Workshop: Advanced application of VP FESEM with EDX, WDX & EBSD

Variable Pressure Field Emission Scanning Electron Microscope (VPFESEM) is used in a wide range of applications such as mineralogy, ceramics, polymer, metallurgy, electronic devices, chemistry, physics and life sciences. With variable pressure, it allows imaging and microanalysis of conductive or nonconductive materials without coating. FESEM, on the other hand, provides ultra-high resolution imaging to visualize very small topographic details on the top surface or entire fractioned objects. The system is equipped with several detectors to detect various signals such as secondary electrons (SE) detector for topographic information, back-scattered electrons (BSE) detector for materials composition contrast, Energy dispersive x-ray spectroscopy (EDS) for elemental composition, Wavelength dispersive x-ray spectroscopy (WDS) for detecting elements that cannot be resolved with EDS and Electron backscattered diffraction (EBSD) for analyzing crystallography of a sample.

Focussed ion Beam-Scanning Electron Microscope (FIB-SEM) can be used to remove material in a controlled way. This enables users to fabricate nano and micro-scale structures as well as prepare TEM lamellae.

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